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A Nonlinear Resonator and Method for Ultra Sensitive Chemical Detection

This invention relates to a method of evaluating resonance responses of nonlinear NEMS or MEMS devices due to mass or force loading or other stimuli. The method allows a suitable NEMS or MEMS device or array to function as, e.g., a highly sensitive detector of chemical or biological species. The resonating structures applicable to this invention can be in a form of suspended beams or a more complex, arbitrary geometry with one or several clamping points.

Center for Nanophase Matls Sciences Div
Oak Ridge National Laboratory
Oak Ridge National Laboratory
Phone: (865) 241-3808
Nanophase Materials
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