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Beam anchor Coating Polysilicon beam Bottom plate Substrate Microfabricated Cantilever Micro-Sensor Array Platform Low-cost, very low-power wireless sensor array platform Low cost sensors are critical need and enabling technology in many sectors Numerous national studies and working groups have identified low-cost, very low-power sensors as a critical technology for increasing energy efficiency, reducing waste, optimizing processes, and enabling homeland security efforts. Sensor arrays that include wireless connections, signal processing, and self diagnostics and calibration will allow researchers to monitor processes more fully and increase knowledge gained in their research and end users to better measure, control, and optimize processes.

Two major application areas would include buildings and factories that monitor for energy reduction, plant safety, waste minimimization, increased yield, and higher throughput. Better control of the indoor environment and improved personnel health will also be possible with low-cost sensing.

Reducing the power requirements will allow batteries to power these arrays for years and make energy scavenging from the enviroment a real possibility for running the sensors. This would make the peel, stick, and forget sensing a realistic goal and especially attractive to homeland security needs.

Development of low-cost, very low-power, wireless micro-sensor array platform The overall goal is to develop a micro-sensor array platform for measuring physical and chemical parameters. The array is based on patented work in microfabricated cantilever arrays. The cantilever operates by coating it with a material that selectively absorbs that chemical. In stress detection mode, the selectively-absorbing coating expands and bends the cantilever, while in mass mode, the mass of the absorb material reduces the resonant frequency of the cantilever. Cantilever transduction provides high sensitivity and economical microfabrication of arrays; advantages over other solid-state sensors.

We have developed electrical readouts sensing the change in capacitance between the cantilever and a base plate. We have demonstrated sensitivities to 0.1 nanometer of movement and parts-per-billion concentration for some gases. Arrays with ten microcantilevers have been fabricated, and coatings have been developed for several gases including mercury and hydrogen. Ongoing development includes incorporating IR sensing for occupancy and motion detection as well as adding more gases to the measurement capabilities such as carbon dioxide, humidity, and carbon monoxide. Additional development in robust protocols for signal transmission over power lines is underway.

10-Cantilever Array with Readout Electronics (Latest version needs less than one milliwatt.) Features MicroSensor Array Tens of sensors on a single substrate Variety of sensors gases, motion, temperature Very low power 5mW in continuous, microwatts in pulsed mode for complete measurement system Wireless transmission or Transmission over existing infrastructure power wiring Low cost $10s for an array system Point of Contact: James E. Hardy Leader, Sensor and Instrument Research Group Oak Ridge National Laboratory P.O. Box 2008 Oak Ridge, TN 37831-6004 Phone: 865-576-8670 FAX: 865-574-1249 E-mail: IR Sensitive MicroCantilever Intelligent sensor platform SPREAD CODE GEN.

Multiple-sensor spread-spectrum telemetry architecture TEMP SENSOR Sensors & front-end signal processing RH SENSOR CO2 SENSOR IR SENSOR MUX & AMP ADC Digitization, control, & spreading- code generation CONTROL & DATA PROCESSING EXTERNAL PROGRAMMING INTERFACE CLOCK RF FREQ.


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